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Fabrication Techniques and Their Resonance Characteristics of FBAR Devices

Yoon, Giwan; Song, Hae-il; Lee, Jae-young; Linh, Mai; Kabir, S. M. Humayun, 한국해양정보통신학회 추계종합학술대회 , pp.204 - 207, 한국해양정보통신학회, 2007-10

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