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Design Guidelines of Thermally Stable Hafnia Ferroelectrics for the Fabrication of 3D Memory Devices

Kim, Giuk; Shin, Hunbeom; Eom, Taehyong; Jung, Minhyun; Kim, Taeho; Lee, Sangho; Kim, Minki; et al, 2022 International Electron Devices Meeting, IEDM 2022, pp.541 - 544, Institute of Electrical and Electronics Engineers Inc., 2022-12

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