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Investigation on the Electrical Contact Behaviors of RF MEMS Switches Using Nano-Indenter

Kim, DS; Ko, SD; Lee, S; Lee, BK; Yoon, Jun-Bo; Kim, DK, 11th International Symposium on Nanocomposites and Nanoporous Materials, 11th International Symposium on Nanocomposites and Nanoporous Materials, 2010-12-02

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