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1
Effects of Post Metal and Forming Gas Annealing on Characteristics of Ferroelectric FinFETs with HfZrOX Gate Dielectric

Seo, Myung Soo; Kang, Min Ho; Kim, Wu Kang; Hur, Jae; Yun, Seok Jung; Kim, Hoon; Hong, Seung Bum; et al, 2018 MRS Fall Meeting & Exhibit, 2018 MRS Fall Meeting, 2018-11-28

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