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Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack

Cho, Byung Jin; Park, CS; Song, SC; Bersuker, G; Alshareef, HN; Ju, BS; Majhi, 2006 International Conference on Solid State Devices and Materials (SSDM 2006), pp.0 - 0, 2006-09-12

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