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A Capacitive-type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial layer

Lee, Jae Woo; Je, CH; Kim, YG; Lee, SQ; Yang, WS; Lee, Sang Gug, 2015 International Conference on Electronics, Information and Communication, Institute of Electronics and Information Engineers, 2015-01-29

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