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Efforts toward ideal microelectromechanical switches

Yoon, Jun-Bo; Yoon, Yong-Hoon; Seo, Min-Ho; Ko, Seung-Deok; Song, Yong-Ha; Kim, Min-Wu; Yang, Hyun-Ho; et al, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, pp.171 - 174, Institute of Electrical and Electronics Engineers Inc., 2017-06

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