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Plasma-Enhanced Atomic Layer Deposition of Uniform Hexagonal Boron Nitride Films

Park, Hamin; Kim, Tae Keun; Cho, Sung Woo; Jang, Hong Seok; Lee, Sang Ick; Choi, Sung-Yool, MRS SPRING MEETING 2017, MRS SPRING MEETING 2017, 2017-04-20

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