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Sub-5nm all-around gate FinFET for ultimate scaling

Lee, H.; Yu, L.-E.; Ryu, S.-W.; Han, J.-W.; Jeon, K.; Jang, D.-Y.; Kim, K.-H.; et al, 2006 Symposium on VLSI Technology, VLSIT, pp.58 - 59, 2006-06-13

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