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ECR plasma oxidation effects on performance and stability of polysilicon thin film transistors Lee Jung-Yeal; Han Chul-Hi; Kim, Choong Ki, Proceedings of the 1994 IEEE International Electron Devices Meeting, pp.523 - 526, 1994-12-11 |
Extraction of elastic parameters of heavily boron-doped silicon layer by elimination of misfit dislocations Lee Ho-Jun; Han Chul-Hi; Kim, Choong Ki, Proceedings of the 1995 MRS Spring Meeting, v.378, pp.129 - 134, 1995-04-17 |
Fabrication of a single crystal silicon substrate for AM-LCD using vertical etching of (110) silicon Yoon Jun-Bo; Lee Ho-Jun; Han Chul-Hi; Kim, Choong Ki, Proceedings of the 1995 MRS Spring Meeting, v.377, pp.859 - 864, 1995-04-18 |
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