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Effect of High Pressure Annealing Temperature on the Ferroelectric Properties of TiN/Hf0.25Zr0.75O2/TiN Capacitors Jeon, Sanghun; Das, Dipjyoti; Gaddam, Venkateswarlu, 4th Electron Devices Technology and Manufacturing Conference, EDTM 2020, IEEE, 2020-03 |
Ferroelectricity Enhancement in Hf0.5Zr0.5O2 Capacitors by Incorporating Ta2O5 Dielectric Seed Layers Gaddam, Venkateswarlu; Das, Dipjyoti; Jeon, Sanghun, IEEE Electron Devices Technology and Manufacturing Conference (EDTM), IEEE, 2020-03 |
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