Showing results 1 to 2 of 2
Effect of electron-beam lithography on thin gate oxide reliability Cho, Byung Jin; Chong, PF; Chor, EF; Joo, MS, 8th International Symp. on the Physical and Failure Analysis of Integrated Circuits (IPFA), pp.55 - 55, 2001-07-09 |
Integrity of gate oxides irradiated under electron-beam lithography conditions Cho, Byung Jin; Chong, PF; Chor, EF; Joo, MS; Yeo, IS, Extended Abstract of the 1999 International Conf. on Solid State Devices and Materials (SSDM), pp.182 - 182, 1999-09-08 |
Discover