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Ge 기반의 소자에서 Y-ZrO2 게이트 유전체를 이용한 EOT 스케일링(~5.7 A) 및 누설 전류와 계면 트랩의 감소 Lee, Tae In; Kim, Min Ju; Manh-Cuong Nguyen; Ahn, Hyunjun; Moon, Jung Min; Lee, Tae Yoon; Yu, Hyun-Young; et al, 제25회 한국반도체학술대회, 서강대학교, 2018-02-07 |
Low Temperature and Ion-Cut Based Monolithic 3D Process Integration Platform Incorporated with CMOS, RRAM and Photo-Sensor Circuits Han, Hoonhee; Cho, Byung-Jin; Choi, Rino; Jung, Seong-Ook; S. C. Song; Choi, Changhwan; Chung, SungWoo, 66th IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), IEEE, 2020-12-15 |
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