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Grazing incidence X-ray analysis of ZnO thin films grown by atomic layer deposition

Kim, Jong Yun; Park, Sang-Hee Ko; Jeong, Hu Young; Choi, Sung-Yool; Choi, J. Y.; Yoon, Tae Hyun, International Conference on Materials for Advanced Technologies 2007, International Conference on Materials for Advanced Technologies 2007, 2007-07-05

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