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Fabrication of three-demensional SiCN ceramic microstructures using soft-mold lithography Yang, Dong-Yol; Yoon, Jun-Bo; Lim, T. W.; Park, S. H.; Pham, A. T.; Kim, D. P.; Chan, S. I., Proc. Nanoeng, Symposium, pp.305 - 308, 2005-10-26 |
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