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Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation Dependence of HfZrOx on Si

Kuk, Songhyeon; Han, Jae-Hoon; Kim, Bong Ho; Kim, Joon Pyo; Kim, Sanghyeon, 2023 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2023, Institute of Electrical and Electronics Engineers Inc., 2023-06-13

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