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TiOx/Ti/TiOx Tri-layer Film-based Waveguide Bolometric Detector for On-Chip Si Photonic Sensors

SHIM, JOONSUP; Lim, Jinha; Geum, Dae-Myeong; You, Jong-Bum; Yoon, Hyeonho; Kim, Joon Pyo; Baek, Woo Jin; et al, IEEE International Electron Devices Meeting (IEDM), pp.9.1.1 - 9.1.4, IEEE, 2021-12-11

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