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Titanium nitride sidewall stringer process for lateral nanoelectromechanical relays

Lee, D.; Lee, W.S.; Provin, e J.; Lee, J.-O.; Yoon, Jun-Bo; Howe, R.T.; Mitra, S.; et al, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, pp.456 - 459, IEEE, 2010-01-24

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