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THREE-DIMENSIONAL (3-D) RESHAPING TECHNIQUE IN MEMS DEVICES BY SOLELY ELECTRICAL CONTROL WITH ULTRAFINE TUNING RESOLUTION

Yoon, Yong-Hoon; Han, Chang-Hoon; Yoon, Jun-Bo, The 27th IEEE International Conference on Micro electro Mechanical System, MEMS 2014, pp.660 - 663, IEEE, 2014-01-30

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