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Micromachined Fourier transform spectrometer on silicon optical bench platform

Yu, Kyoungsik; Lee, Daesung; Krishnamoorthy, Uma; Park, Namkyoo; Solgaard, O., Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on, v.2, pp.1250 - 1254, TRANSDUCERS, 2005-06-05

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