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Iridium Thin Film as a Bottom Electrode for High Dielectric (Ba,Sr)TiO3 Capacitors Lee, Hee Chul; Cha, SY; Jang, BT; Kwak, KH; Shin, CH, 9th International Symposium on Integrated Ferroelectrics, 1997 |
Reactive Ion Beam Etching of Ir Bottom Electrode for High Dielectric (Ba,Sr)TiO3 Capacitor Integration Lee, Hee Chul; Cha, SY; Kim, DH; Jang, BT; Kwak, DH, The 9th International Meeting on Ferroelectricity, pp.0 - 0, 1997-08-01 |
The Post-Annealing Effect on the Electrical Properties of SrBi2Ta2O9 Thin film by Sol-gel Method Lee, Hee Chul; Shin, CH; Jang, BT; Cha, SY; Kwak, DH, The 9th International Meeting on Ferroelectricity, pp.0 - 0, 1997-08-01 |
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