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Highly reliable MEMS relay with two-step spring system and heat sink insulator for power applications

Yoon, Yong Hoon; Song, Yong Ha; Ko, Seung Deok; Han, Chang Hoon; Youn, Gun Sik; Seo, Min Ho; Yoon, Jun Bo, The 28th IEEE International Conference on Micro electro Mechanical System, MEMS 2015, pp.114 - 117, IEEE, 2015-01-21

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