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Fabrication of polycrystalline silicon field emitter arrays having tips sharpened by dry etching Kang, Sueng-Youl; Song, Yoon-Ho; Lee, Jin Ho; Choi, Sung-Yool; Cho, Kyoung-Ik, 1998 International Display Workshop, 1998 International Display Workshop, 1998-12-09 |
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