학위논문(박사) - 한국과학기술원 : 기계공학전공, 2007. 8, [ xiii, 123 p. ]
dispersive white-light interferometry; thin-film thickness profile measurement; 분산 백색광 간섭법; 박막두께형상측정; dispersive white-light interferometry; thin-film thickness profile measurement; 분산 백색광 간섭법; 박막두께형상측정
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