학위논문(박사) - 한국과학기술원 : 기계공학전공, 2004.8, [ xvi, 193 p. ]
NANO-MANIPULATIONHASE ANGLE; INERTIAL SLIDER; TEM; AFM; NANOPOSITIONING STAGE; PARALLEL GEOMETRY; 나노조작유용도; 초정밀; 투과전자현미경; 원자현미경; 나노위치결정 스테이지; INEFFECTIVENESS; SEGMENTATION
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