DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김수현 | - |
dc.contributor.advisor | Kim, Soo-Hyun | - |
dc.contributor.author | 제갈원 | - |
dc.contributor.author | Che, Gal-Won | - |
dc.date.accessioned | 2011-12-14T05:25:28Z | - |
dc.date.available | 2011-12-14T05:25:28Z | - |
dc.date.issued | 2003 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=231060&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/43479 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 기계공학전공, 2003.8, [ viii, 99 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 박막 두께 측정 | - |
dc.subject | 결상 분광기 | - |
dc.subject | 분광 결상 타원계측기 | - |
dc.subject | 타원계측기 | - |
dc.subject | 타원계측법 | - |
dc.subject | ellipsometry | - |
dc.subject | thin film thickness measurement | - |
dc.subject | spectrograph | - |
dc.subject | spectral imaging ellipsometer | - |
dc.subject | ellipsometer | - |
dc.title | 단축 결상 분광기를 이용한 분광 결상 타원계측기 | - |
dc.title.alternative | Spectral imaging ellipsometer with mono axial power spectrograph | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 231060/325007 | - |
dc.description.department | 한국과학기술원 : 기계공학전공, | - |
dc.identifier.uid | 000985359 | - |
dc.contributor.localauthor | 김수현 | - |
dc.contributor.localauthor | Kim, Soo-Hyun | - |
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