학위논문(박사) - 한국과학기술원 : 기계공학전공, 2008. 8., [ ix, 106 p. ]
low-coherence interferometry; complex surface; Optical measurement; film measurement; chip packaging; 저결맞음 간섭계; 복잡형상; 광측정; 막측정; 칩패키징; low-coherence interferometry; complex surface; Optical measurement; film measurement; chip packaging; 저결맞음 간섭계; 복잡형상; 광측정; 막측정; 칩패키징
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.