학위논문(박사) - 한국과학기술원 : 기계공학전공, 2006.2, [ x, 137 p. ]
진공도; 진공 스테이지; Vacuum-Compatible Air Bearing; Leakage Analysis; Degree of Vacuum; Vacuum Stage; 진공환경용 공기베어링; 누출량 해석
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