학위논문(박사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vii, 135 p. ]
운동 정밀도; 위치결정정도; 레이저 간섭계; 광위상간섭계; Twyman-Green interferometry; 5-axis Tilt Error; Linear accuracy; Laser interferometer
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