학위논문(박사) - 한국과학기술원 : 기계공학과, 1999.8, [ [ix], 120 p. ]
평판디스플레이; 미소광개폐소자; 정전구동; 미소기전소자; 기상식각; Vapor phase etching; Flat panel display; Micro-shutter; Electrostatic actuation; MEMS
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