DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 권영세 | - |
dc.contributor.advisor | Kwon, Young-Se | - |
dc.contributor.author | 이건상 | - |
dc.contributor.author | Lee, Gun-Sang | - |
dc.date.accessioned | 2011-12-14T02:14:24Z | - |
dc.date.available | 2011-12-14T02:14:24Z | - |
dc.date.issued | 1990 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67358&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/39147 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1990.2, [ [ii], 41 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | RIE(reactive ion etching) 장비의 제작 및 GaAs 식각 연구 | - |
dc.title.alternative | Study on a RIE(reactive ion etching) system and its GaAs etching | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 67358/325007 | - |
dc.description.department | 한국과학기술원 : 전기 및 전자공학과, | - |
dc.identifier.uid | 000881312 | - |
dc.contributor.localauthor | 권영세 | - |
dc.contributor.localauthor | Kwon, Young-Se | - |
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