DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 권영세 | - |
dc.contributor.advisor | Kwon, Young-Se | - |
dc.contributor.author | 홍창희 | - |
dc.contributor.author | Hong, Chang-Hee | - |
dc.date.accessioned | 2011-12-14T02:11:38Z | - |
dc.date.available | 2011-12-14T02:11:38Z | - |
dc.date.issued | 1986 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=65253&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/38959 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1986.2, [ [ii], 48 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | 플라즈마 식각 장비 제작 및 식각 연구 | - |
dc.title.alternative | Implementation and characterization of a plasma etching system | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 65253/325007 | - |
dc.description.department | 한국과학기술원 : 전기 및 전자공학과, | - |
dc.identifier.uid | 000841375 | - |
dc.contributor.localauthor | 권영세 | - |
dc.contributor.localauthor | Kwon, Young-Se | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.