Fabrication of submicron T-gate GaAs FET and preamplifierSubmicron T-gate GaAs FET 및 preamplifier 제작

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dc.contributor.advisorKwon, Young-Se-
dc.contributor.advisor권영세-
dc.contributor.authorHwang, Jong-Seung-
dc.contributor.author황종승-
dc.date.accessioned2011-12-14T02:01:43Z-
dc.date.available2011-12-14T02:01:43Z-
dc.date.issued1995-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99305&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/38315-
dc.description학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1995.2, [ ii, 52 p. ]-
dc.description.abstractSubmicron T-Gate GaAs FET is fabricated. It uses 1㎛ FET photolithography process. So, its process has high productivity and low cost. Fabricated FET has $L_g$ of 0.4㎛, $g_m$ of 173 mS/mm, $f_T$ of 32 GHz and $f_T$ of 64 GHz. Using T-Gate FET, preamplifier for optical communication is designed and fabricated. Fabricated amplifier has bandwidth of 1.7 GHz, transimpedance of 66.5 dBΩ, and $S_22$ under -15 dB. The laser lithography system for mask fabrication is developed. The minimum line width for fine pattern is 2.5 ㎛.eng
dc.languageeng-
dc.publisher한국과학기술원-
dc.titleFabrication of submicron T-gate GaAs FET and preamplifier-
dc.title.alternativeSubmicron T-gate GaAs FET 및 preamplifier 제작-
dc.typeThesis(Master)-
dc.identifier.CNRN99305/325007-
dc.description.department한국과학기술원 : 전기및전자공학과, -
dc.identifier.uid000933564-
dc.contributor.localauthorKwon, Young-Se-
dc.contributor.localauthor권영세-
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