DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 한철희 | - |
dc.contributor.advisor | Han, Chul-Hi | - |
dc.contributor.author | 최강식 | - |
dc.contributor.author | Choi, Kang-Sik | - |
dc.date.accessioned | 2011-12-14T02:01:36Z | - |
dc.date.available | 2011-12-14T02:01:36Z | - |
dc.date.issued | 1995 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99297&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/38307 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1995.2, [ ii, 45 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | 자외선 복사와 유도결합 플라즈마를 이용한 구리 식각 | - |
dc.title.alternative | Plasma etching of copper using UV radiation and inductively coupled plasma | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 99297/325007 | - |
dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
dc.identifier.uid | 000933501 | - |
dc.contributor.localauthor | 한철희 | - |
dc.contributor.localauthor | Han, Chul-Hi | - |
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