수은 증감 광화학기상증착법에 의한 미결정 실리콘과 에피 실리콘 박막의 제작과 특성Preparation and characteristics of microcrystalline Si:H and epitaxial Si deposited by mercury sensitized photo chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 임굉수 | - |
| dc.contributor.advisor | Lim, Keong-Su | - |
| dc.contributor.author | 신성원 | - |
| dc.contributor.author | Shin, Sung-Won | - |
| dc.date.accessioned | 2011-12-14T02:01:08Z | - |
| dc.date.available | 2011-12-14T02:01:08Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99266&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/38276 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1995.2, [ iii, 97 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 수은 증감 광화학기상증착법에 의한 미결정 실리콘과 에피 실리콘 박막의 제작과 특성 | - |
| dc.title.alternative | Preparation and characteristics of microcrystalline Si:H and epitaxial Si deposited by mercury sensitized photo chemical vapor deposition | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99266/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000933266 | - |
| dc.contributor.localauthor | 임굉수 | - |
| dc.contributor.localauthor | Lim, Keong-Su | - |
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