Reactive sputtering 기법을 이용한 AIN 박막 증착과 film bulk acoustic resonator 제작Deposition of AIN by reactive sputtering and fabrication of film bulk acoustic resonator
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 홍성철 | - |
| dc.contributor.advisor | Hong, Song-Cheol | - |
| dc.contributor.author | 조태희 | - |
| dc.contributor.author | Cho, Tae-Hee | - |
| dc.date.accessioned | 2011-12-14T02:00:22Z | - |
| dc.date.available | 2011-12-14T02:00:22Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69569&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/38225 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1994.2, [ ii, 66 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Reactive sputtering 기법을 이용한 AIN 박막 증착과 film bulk acoustic resonator 제작 | - |
| dc.title.alternative | Deposition of AIN by reactive sputtering and fabrication of film bulk acoustic resonator | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 69569/325007 | - |
| dc.description.department | 한국과학기술원 : 전기 및 전자공학과, | - |
| dc.identifier.uid | 000923502 | - |
| dc.contributor.localauthor | 홍성철 | - |
| dc.contributor.localauthor | Hong, Song-Cheol | - |
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