Electrostatic microactuator devices for display application

Abstract

The microactuator device for flat panel display application was investigated. The microactuator device consists of upper electrodes, lower electrodes and opaque movable thin metal films for intercepting the light. The upper electrode was composed of ITO (Indium thin oxide) glass and the lower electrode was fabricated by electroplating to have round configuration and to have low threshold voltage. The movable thin metal cantilever was fabricated by cu-evaporator and its thickness was varied from 0.1㎛ to 0.25㎛. The Cu cantilever moved down if the applied voltage was over critical voltage and moved up when there was no applied voltage or when voltage was applied between the upper electrode and the thin metal cantilever. in case of 0.1㎛ -thick Cu cantilever threshold voltage was 51 V and 105 V for 0.17㎛ -thick Cu cantilever.