건식식각을 이용한 표면회절격자의 제작Fabrication of the surface grating using dry etching
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권영세 | - |
| dc.contributor.advisor | Kwon, Young-Se | - |
| dc.contributor.author | 김영민 | - |
| dc.contributor.author | Kim, Young-Min | - |
| dc.date.accessioned | 2011-12-14T01:43:29Z | - |
| dc.date.available | 2011-12-14T01:43:29Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150832&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/37143 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1999.2, [ 44 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 건식식각을 이용한 표면회절격자의 제작 | - |
| dc.title.alternative | Fabrication of the surface grating using dry etching | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 150832/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000973126 | - |
| dc.contributor.localauthor | 권영세 | - |
| dc.contributor.localauthor | Kwon, Young-Se | - |
- Appears in Collection
- EE-Theses_Master(석사논문)
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