전자선 묘화와 반응성 이온 식각을 이용한 나노구조형성 및 나노구조의 기억소자 제작Formation of nano-structure and fabrication of nano-structure memory using E-beam lithography and reactive ion etching
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 신형철 | - |
| dc.contributor.advisor | Shin, Hyung-Cheol | - |
| dc.contributor.author | 박근숙 | - |
| dc.contributor.author | Park, Geun-Sook | - |
| dc.date.accessioned | 2011-12-14T01:41:57Z | - |
| dc.date.available | 2011-12-14T01:41:57Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=134828&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/37045 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1998.2, [ iii, 75 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | RIE | - |
| dc.subject | 기억소자 | - |
| dc.subject | Nano | - |
| dc.subject | 전자선묘화 | - |
| dc.subject | E-beam lithography | - |
| dc.subject | RIE | - |
| dc.subject | Momory | - |
| dc.subject | Nano | - |
| dc.title | 전자선 묘화와 반응성 이온 식각을 이용한 나노구조형성 및 나노구조의 기억소자 제작 | - |
| dc.title.alternative | Formation of nano-structure and fabrication of nano-structure memory using E-beam lithography and reactive ion etching | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 134828/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000963222 | - |
| dc.contributor.localauthor | 신형철 | - |
| dc.contributor.localauthor | Shin, Hyung-Cheol | - |
- Appears in Collection
- EE-Theses_Master(석사논문)
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