학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 1999.2, [ vii, 168 p. ]
TFT; Polysilicon; Nitrogen; Plasma oxide; ECR; Short-channel; 안정성; 단채널; 박막트랜지스터; 다결정 실리콘; 질소; 아질화산소; Stability; 플라즈마 산화막
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