Experimental analysis and modeling of micromachined high-Q integrated inductors = 마이크로머시닝 기술을 이용한 고성능 집적 인덕터의 실험적 분석 및 모델링

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Integrated inductors for RF ICs have been intensively investigated since the performance of the integrated inductor can determine that of the RF ICs. Recently, the integrated inductor using micromachining technologies have developed and the performance of the integrated inductor has been much enhanced compared to that of inductors using conventional IC process. In this thesis, the micromachined high-Q integrated inductors have been experimentally analyzed and the model for the integrated inductor has been proposed. In this thesis, the effect of two important factors, metal thickness and insulating layer thickness, to the performance of integrated inductors has been investigated with the experimental results. The inductors for the analyses have been fabricated by thick metal surface micromachining technology to fabricate the thick metal line and high separation gap. From the experimental analysis of the effect of metal thicknesses, it was reported that the enhancement of Q-factor as increasing metal thickness is mainly determined by the proximity effect to induce eddy current and the Q-factor can be enhanced by thicker metal line if the proximity effect in the inductor is negligible. Through the study into the effect of insulating layer thickness, we have shown that the Q-factor of the air-suspended inductor strongly depends on not only the thick air-gap but the oxide thickness below the under-pass line. Especially, we have firstly shown that the under-pass line in the integrated inductor plays an important role to determine the Q-peak frequency when the insulating layer between the inductor line and substrate is fairly thick. In this thesis, we have tested feasibility of the PDMS encapsulation of the air-suspended inductors by investigating structural deformation and RF performance variation after encapsulation with PDMS. From this study, we have shown that encapsulation with PDMS can be a good and practical solution for addressing the mechanical stability and ...
Advisors
Yoon, Jun-Boresearcher윤준보researcher
Description
한국과학기술원 : 전기및전자공학전공,
Publisher
한국과학기술원
Issue Date
2004
Identifier
240727/325007  / 000995379
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 전기및전자공학전공, 2004.8, [ ii, 106 p. ]

Keywords

UBIQUITOUS COMPUTING; LEVENBERG MARQUART LEARNING; HIDDEN MARKOV MODEL; GAIT; MICROMACHININGOTPRINT; MODEL; INTEGRATED INDUCTORS; PERSONALIZED SERVICE; 개인화 서비스; 유비쿼터스 컴퓨팅; 레벤버그 마큇 학습; 은닉 마코프 모델; 걸음걸이; 마이크로머시닝 발자국; 집적 인덕터; 모델

URI
http://hdl.handle.net/10203/36037
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=240727&flag=dissertation
Appears in Collection
EE-Theses_Ph.D.(박사논문)
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