Amidoalane과 triethylboron-amine complex의 합성 및 단일 전구체 OMCVD법에 의한 AIN 박막의 제조Synthesis of amidoalanes and triethylboron-amine complexes and preparation of AIN thin films by single-precursor OMCVD
- Advisors
- 박준택researcher; Park, Joon-Taikresearcher
- Description
- 한국과학기술원 : 화학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69181/325007 / 000923296
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 화학과, 1994.2, [ vii, 50 p. ]
- Appears in Collection
- CH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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