The reaction of 2-chloro-3,3,4,4-tetrafluorocyclobutenylanhydride, trifluoroacetyl chloride and perfluorosuccinic acid with amines gave amides containing perfluoroalkyl group in ether solution. Perfluoroalkyloxazoles were synthesized by the reaction of trifluoroacetyl chloride (or perfluorosuccinic acid) with 2-aminophenol and ethanolamine followed by cyclization under acidic condition in high yields. These products were identified by means of $^1$H nmr, IR, and $^{19}$F nmr spectroscopy.