학위논문(석사) - 한국과학기술원 : 신소재공학과, 2023.2,[iv, 61 p. :]
강유전체▼a지르코늄 옥사이드▼a루테늄▼aCMOS 공정 호환▼a원자층증착법▼a금속-강유전체-금속 커패시터▼a플라즈마▼a웨이크업 효과▼a패티그 효과▼a모놀리식 공정; ferroeletricity▼aZirconium Oxide▼aRuthenium▼aCMOS processing compatible▼aAtomic layer deposition▼aMetal-ferroelectric-metal capacitor▼aPlasma▼aWake up effect▼aFatigue▼aMonolithic processing
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