Fabrication of a highly sensitive flexible temperature sensor using low-temperature plasma process

Abstract

Body temperature is the easiest indicator to identify abnormalities in the human body. Due to the COVID-19 pandemic, there has been an increased public interest in healthcare, leading to an increased demand for real-time body temperature monitoring. As a result, research on contact-type flexible temperature sensors has been extensively conducted. Temperature sensors with high sensitivity are required for accurate temperature monitoring. The conventional fabrication process for highly sensitive temperature sensors involve a high-temperature process above 400 degrees Celsius. However, most flexible substrates have a glass transition temperature below 400 degrees, making the application of the conventional process impossible. To address this issue, numerous studies have focused on the solution-based fabrication methods. However, due to the inherent limitations of the process, significant performance deviations have occurred among the temperature sensors. In this thesis, we aim to demonstrate the potential for utilizing high-sensitivity flexible temperature sensors by developing a new low-temperature process with high performance uniformity.