학위논문(석사) - 한국과학기술원 : 신소재공학과, 2023.8,[v, 49 p. :]
나노패터닝▼a역설계▼a입자 군집 최적화▼a3차원 패터닝▼a간섭 리소그래피; nanopatterning▼ainverse design▼aparticle swarm optimization▼athree-dimensional patterning▼ainterference lithography
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