DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Seung-Seob | ko |
dc.contributor.author | Lee, Seok Woo | ko |
dc.contributor.author | Lee, Jung A | ko |
dc.date.accessioned | 2024-06-04T08:00:41Z | - |
dc.date.available | 2024-06-04T08:00:41Z | - |
dc.identifier.uri | http://hdl.handle.net/10203/319628 | - |
dc.description.abstract | Provided is a method for manufacturing a field emission array with a carbon microstructure. The method includes: a photomask attachment step of attaching a photomask with a pattern groove to one surface of a transparent substrate; a photoresist attachment step of attaching a negative photoresist to one surface of the photomask; an exposure step of irradiating light toward the opposite surface of the transparent substrate from the photomask to cure a portion of the negative photoresist with the light irradiated on the negative photoresist through the pattern groove; a developing step of removing an uncured portion of the negative photoresist while leaving the cured portion of the negative photoresist as a microstructure; a pyrolysis step of heating and carbonizing the microstructure thus obtained; and a cathode attachment step of attaching a voltage-supplying cathode to the surface of the transparent substrate on which the microstructure is formed. | - |
dc.title | Field emission array having carbon microstructure and method of manufacturing the same | - |
dc.title.alternative | 탄소 미세 구조물을 갖는 전계방출 어레이 및 그 제조 방법 | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Lee, Seung-Seob | - |
dc.contributor.nonIdAuthor | Lee, Seok Woo | - |
dc.contributor.nonIdAuthor | Lee, Jung A | - |
dc.contributor.assignee | KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 12450965 | - |
dc.identifier.patentRegistrationNumber | 8017413 | - |
dc.date.application | 2008-07-01 | - |
dc.date.registration | 2011-09-13 | - |
dc.publisher.country | US | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.