Liquid chip for electron microscope having excellent bulging resistance

Abstract

The present disclosure relates to a fluid chip for an electron microscope including a lower chip, an upper chip, and a fluid channel part for supplying a fluid sample, and may attach a transmissive thin film part of a graphene material having excellent bulging resistance to a plurality of holes formed in a fluid channel part to increase the thickness of a support not serving as a transmissive window thicker than the conventional one, thereby minimizing the loss of a spatial resolution and also suppressing the bulging phenomenon of the transmissive window while supplying the fluid sample more stably. Further, the present disclosure may form an electrode which may be connected with an external electrical supply source in the fluid channel part, thereby analyzing electrochemical or thermochemical reaction of the fluid sample in the fluid channel part in real time.