Programmable MZI Based on Si Photonic MEMS Tunable Delay Line

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We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062-0.524 nm) as well as extinction ratio (1-16 dB). Static power consumption is less than 16 nW.
Publisher
Optica Publishing Group (formerly OSA)
Issue Date
2022-09
Language
English
Citation

2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO/PR 2022

DOI
10.1364/CLEOPR.2022.CThP8F_07
URI
http://hdl.handle.net/10203/317850
Appears in Collection
EE-Conference Papers(학술회의논문)
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