Development of block copolymer containing organosilicon polymer gradient random-copolymer block based on reactive polymer for EUVL pattern transfer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 홍지현 | ko |
| dc.contributor.author | 정연식 | ko |
| dc.date.accessioned | 2024-01-09T08:01:56Z | - |
| dc.date.available | 2024-01-09T08:01:56Z | - |
| dc.date.created | 2024-01-08 | - |
| dc.date.issued | 2023-10-11 | - |
| dc.identifier.citation | 2023 한국고분자학회 추계학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/317591 | - |
| dc.language | English | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | Development of block copolymer containing organosilicon polymer gradient random-copolymer block based on reactive polymer for EUVL pattern transfer | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2023 한국고분자학회 추계학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 제주국제컨벤션센터 | - |
| dc.contributor.localauthor | 정연식 | - |
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.